公开(公告)号：DE69320992D1

公开(公告)日：1998-10-15

申请号：DE69320992

申请日：1993-10-04

Applicant: IBM

Inventor： HECHT BERT ,  HEINZELMANN HARALD ,  NOVOTNY LUKAS ,  POHL WOLFGANG

IPC: G01N37/00 ,  G01Q60/18 ,  G01Q70/02 ,  G02B21/00

Abstract: PCT No. PCT/EP93/02713 Sec. 371 Date Apr. 25, 1996 Sec. 102(e) Date Apr. 25, 1996 PCT Filed Oct. 4, 1993 PCT Pub. No. WO95/10060 PCT Pub. Date Apr. 13, 1995The invention relates to a near-field optical microscope, in particular to a scanning near-field optical microscope (SNOM), comprising means for determining the intensity of light emerging from the near-field at a direction differing from the direction perpendicular to the surface of the sample to be examined, preferably emerging at an angle theta larger than the critical angle. The invention allows an accurate control of the distance between the probing tip of the SNOM and the sample by using the measured intensity in a feedback loop.

公开(公告)号：DE69320992T2

公开(公告)日：1999-05-27

申请号：DE69320992

申请日：1993-10-04

Applicant: IBM

Inventor： HECHT BERT ,  HEINZELMANN HARALD ,  NOVOTNY LUKAS ,  POHL WOLFGANG

IPC: G01N37/00 ,  G01Q60/18 ,  G01Q70/02 ,  G02B21/00

Abstract: PCT No. PCT/EP93/02713 Sec. 371 Date Apr. 25, 1996 Sec. 102(e) Date Apr. 25, 1996 PCT Filed Oct. 4, 1993 PCT Pub. No. WO95/10060 PCT Pub. Date Apr. 13, 1995The invention relates to a near-field optical microscope, in particular to a scanning near-field optical microscope (SNOM), comprising means for determining the intensity of light emerging from the near-field at a direction differing from the direction perpendicular to the surface of the sample to be examined, preferably emerging at an angle theta larger than the critical angle. The invention allows an accurate control of the distance between the probing tip of the SNOM and the sample by using the measured intensity in a feedback loop.

公开(公告)号：CA2170860A1

公开(公告)日：1995-04-13

申请号：CA2170860

申请日：1993-10-04

Applicant: IBM

Inventor： HECHT BERT ,  HEINZELMANN HARALD ,  NOVOTNY LUKAS ,  POHL WOLFGANG D

IPC: G01N37/00 ,  G01Q60/18 ,  G01Q70/02 ,  G02B21/00

Abstract: The invention relates to a near-field optical microscope, in particular to a scanning near-field optical microscope (SNOM), comprising means for determining the intensity of light emerging from the near-field at a direction differing from the direction perpendicular to the surface of the sample to be examined, preferably emerging at an angle .theta. larger than the critical angle. Superposing light with different azimuth angles ? by using suitable positioned mirrors and beamsplitters enables imaging with higher contrast. The invention allows an accurate control of the distance between the probing tip of the SNOM and the sample by using the measured intensity in a feedback loop.