Reconfigurable gas sensor architecture with a high sensitivity at low temperatures

    公开(公告)号:GB2541525A

    公开(公告)日:2017-02-22

    申请号:GB201611888

    申请日:2016-07-08

    Applicant: IBM

    Abstract: A gas sensing device 10 comprises a dielectric substrate 16, a heater 18 integrated into the substrate, an insulating dielectric 12 formed over the heater, a gas sensing layer 14, contacts 26 formed on the sensing layer, and a noble material 24 formed on a portion of the sensing layer between the contacts to act as an ionising catalyst such that upon heating to a temperature adsorption of a specific gas changes electronic properties of the sensing layer to permit detection of the gas. The device may have a plurality of different noble metals 24 to sense different gases. A calibration system includes a gas sensing device mounted on a substrate, a gas canister for storing a calibration gas and an injector for enabling local gas release for calibrating the sensor.

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