Abstract:
PROBLEM TO BE SOLVED: To provide a memory structure in which electric characteristics are controlled by indirectly heating a phase change material. SOLUTION: A manufacturing method of a memory device of a phase change material and a phase change memory device prepared by the method thereof are included. Concretely, the phase change memory device contains a semiconductor structure, and the semiconductor structure includes a substrate where a first doped area is contained and a set of second doped areas are disposed at both ends thereof; the phase change material disposed on the first doped area; and a conductor disposed on the phase change material. The semiconductor structure is operated as a bipolar junction transistor when the phase change material is in a first phase, and the semiconductor structure is operated as a MOSFET when the phase change material is in a second phase. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
A gas sensing device 10 comprises a dielectric substrate 16, a heater 18 integrated into the substrate, an insulating dielectric 12 formed over the heater, a gas sensing layer 14, contacts 26 formed on the sensing layer, and a noble material 24 formed on a portion of the sensing layer between the contacts to act as an ionising catalyst such that upon heating to a temperature adsorption of a specific gas changes electronic properties of the sensing layer to permit detection of the gas. The device may have a plurality of different noble metals 24 to sense different gases. A calibration system includes a gas sensing device mounted on a substrate, a gas canister for storing a calibration gas and an injector for enabling local gas release for calibrating the sensor.