公开(公告)号：GB2541525B

公开(公告)日：2018-07-04

申请号：GB201611888

申请日：2016-07-08

Applicant: IBM

Inventor： ROLAND NAGY ,  LEVENTE KLEIN ,  HENDRICK HAMANN ,  SUKJAY CHEY ,  SIYUAN LU

IPC: G01N27/12

公开(公告)号：GB2541525A

公开(公告)日：2017-02-22

申请号：GB201611888

申请日：2016-07-08

Applicant: IBM

Inventor： ROLAND NAGY ,  LEVENTE KLEIN ,  HENDRICK HAMANN ,  SUKJAY CHEY ,  SIYUAN LU

IPC: G01N27/12 ,  G01N27/16 ,  G01N33/00

Abstract: A gas sensing device 10 comprises a dielectric substrate 16, a heater 18 integrated into the substrate, an insulating dielectric 12 formed over the heater, a gas sensing layer 14, contacts 26 formed on the sensing layer, and a noble material 24 formed on a portion of the sensing layer between the contacts to act as an ionising catalyst such that upon heating to a temperature adsorption of a specific gas changes electronic properties of the sensing layer to permit detection of the gas. The device may have a plurality of different noble metals 24 to sense different gases. A calibration system includes a gas sensing device mounted on a substrate, a gas canister for storing a calibration gas and an injector for enabling local gas release for calibrating the sensor.