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公开(公告)号：JPH0681144A
公开(公告)日：1994-03-22
申请号：JP4443793
申请日：1993-02-10
Applicant: IBM
Inventor： HENRII JIYON GURABAATSU , ARUFURETSUDO GURIRU , UIRIAMU MAATEIN HORUBAA , JIYOSEFU SUKINAA ROOGAN , JIEIMUSU TEIENNCHIEN YAA
IPC: C23C14/34 , C23C14/04 , C23C14/32 , C23C14/35 , H01J37/32 , H01L21/285 , H01L21/768 , H05H1/18
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