Abstract:
PROBLEM TO BE SOLVED: To provide a ball-limiting metallurgy (BLM) structure for flip chip connection, which is suitable for use together with a lead-free solder. SOLUTION: An interconnection structure suitable for flip chip connection of microelectronic device chips to packages has a two-, three- or four-layer ball-limiting composition. The composition includes an adhesion/reaction barrier layer and has a solder wettable layer reactive with components of a tin-containing lead-free solder. The solderable layer can be therefore totally consumed during soldering, but a barrier layer remains after being placed in contact with the lead-free solder during soldering. One or more lead-free solder balls are selectively positioned on the solder wettable layer. The lead-free solder balls comprise tin as a main component and one or more alloying components. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
A copper-interconnect, low-K dielectric integrated circuit has reduced corrosion of the interconnect when the crackstop next to the kerf is also used as the primacy barrier to oxygen diffusion through the dielectric, with corresponding elements of the crackstop being constructed simultaneously with the circuit interconnect elements; e.g. horizontal interconnect elements have a corresponding structure in the crackstop and vias between interconnect layers have corresponding structures in the crackstop.
Abstract:
Poorly adherent layers such as silicon nitride and silicon dioxide exhibit improved adhesion to copper member by providing an intervening germanium-containing layer. The germanium-containing layer is copper germanide, germanium oxide, germanium nitride or combinations thereof. The germanium-containing layer enhances the adhesion such that the poorly adherent layer is less susceptible to delamination from the copper member.