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公开(公告)号：US3328643A
公开(公告)日：1967-06-27
申请号：US46824565
申请日：1965-06-30
Applicant: IBM
Inventor： CHU RICHARD C , HENRY MAYRON
CPC classification number: H01L23/4093 , H01L25/03 , H01L2924/0002 , H01L2924/00
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