公开(公告)号：JP2006324675A

公开(公告)日：2006-11-30

申请号：JP2006139399

申请日：2006-05-18

Applicant: IBM

Inventor： HOAGUE TIMOTHY J ,  LEIDY ROBERT K

IPC: H01L27/14 ,  G02B3/00

Abstract: PROBLEM TO BE SOLVED: To provide a structure and a method for increasing a sensitivity of a pixel sensor. SOLUTION: A gap space is removed, which is formed between microlens structures of mutually adjacent pixel sensor arrays. Advantageously, by an exposure and flow conditions, the adjacent microlens structures are brought into contact with each other in a lateral sectional face (connected by web), thereby forming a round lens in all directions. Specifically, by the exposure and flow conditions, each lens of contacting microlens structure is formed in such a manner as matching with each other in a lateral cross section and 45° cross section to have a uniform curvature radius. COPYRIGHT: (C)2007,JPO&INPIT