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公开(公告)号：DE69302359D1
公开(公告)日：1996-05-30
申请号：DE69302359
申请日：1993-09-21
Applicant: IBM
Inventor： HUANG DANIEL L , HSU LOUIS LU-CHEN , WANG WEN-YUAN
IPC: H01L21/336 , H01L29/78
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公开(公告)号：DE69302359T2
公开(公告)日：1996-11-07
申请号：DE69302359
申请日：1993-09-21
Applicant: IBM
Inventor： HUANG DANIEL L , HSU LOUIS LU-CHEN , WANG WEN-YUAN
IPC: H01L21/336 , H01L29/78
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