公开(公告)号：JP2001023982A

公开(公告)日：2001-01-26

申请号：JP18524199

申请日：1999-06-30

Applicant: IBM

Inventor： IMAHARA KAZUMITSU ,  WADA TAKEHIKO

IPC: H01L21/3205 ,  G02F1/13 ,  G02F1/1343 ,  G02F1/136 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/00 ,  H01L21/336 ,  H01L21/768 ,  H01L23/52 ,  H01L23/522 ,  H01L29/786

Abstract: PROBLEM TO BE SOLVED: To obtain a restoring method for recovering functions of electronic components including semiconductor devices, such as liquid crystal displays, when defects occurs in such electronic parts, by restoring their defective portions. SOLUTION: In an electronic component 18, where a plurality of thin films 26 and 28 are laminated on a substrate 24 and properly formed into a prescribed pattern, a transfer film for restoring defects is fitted into a recess 34, to which a lower-layer thin film is exposed by removing part of one or a plurality of layers of the films 26 and 28 including a defective portion 30. Furthermore, a method of restoring defects of the electronic component comprises the steps of removing the portions of the films 26 and 28 covering the peripheral portion of the portion 30 including the portion 30 into a recessed portion 34 to expose the lower-layer thin film, and fitting the transfer film for restoring the defect into the portion 34 to cover the exposed film 26.