公开(公告)号：MY127260A

公开(公告)日：2006-11-30

申请号：MYPI20015266

申请日：2001-11-16

Applicant: IBM

Inventor： ALESSANDRO CESARE CALLEGARI ,  KEI-HSIUNG YANG ,  FUAD ELIAS DOANY ,  PRAVEEN CHAUDHARI ,  JAMES P DOYLE ,  EILEEN A GALLIGAN ,  JAMES H GLOWNIA ,  GARETH G HOUGHAM ,  JAMES A LACEY ,  SHUI-CHIH (ALAN) LIEN ,  MINHUA LU ,  ALAN E ROSENBLUTH

IPC: C07C1/00 ,  B01J19/12 ,  C01B31/02 ,  C23C14/48 ,  C23C14/58 ,  G02F1/133 ,  G02F1/1337

Abstract: A METHOD FOR PREPARING AN ALIGNMENT LAYER SURFACE PROVIDES A SURFACE ON THE ALIGNMENT LAYER (104). THE SURFACE (112) IS BOMBARDED WITH IONS (110), AND REACTIVE GAS IS INTRODUCED TO THE ION BEAM TO SATURATE DANGLING BONDS ON THE SURFACE. ANOTHER METHOD FOR PREPARING AN ALIGNMENT LAYER SURFACE PROVIDES A SURFACE ON THE ALIGNMENT LAYER. THE SURFACE IS BOMBARDED WITH IONS (116) AND QUENCHED WITH A REACTIVE COMPONENT TO SATURATE DANGLING BONDS ON THE SURFACE .(FIG. 7)