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公开(公告)号：CH451326A
公开(公告)日：1968-05-15
申请号：CH88067
申请日：1967-01-20
Applicant: IBM
Inventor： JOHN GEORGE KREN , JOSEPH REGH , DAVID KENROKU SETO
IPC: C23F1/02 , H01L21/00 , H01L21/762 , H01L1/16 , H01L7/00
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