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公开(公告)号:DE2353999A1
公开(公告)日:1974-06-12
申请号:DE2353999
申请日:1973-10-27
Applicant: IBM
Inventor: DEPUY ARTHUR H , JOHNSON LEONARD F , POUGHKEEPSIE N Y , SCHEINBERG STANLEY
IPC: H01L21/822 , H01L21/00 , H01L21/301 , H01L21/66 , H01L21/82 , H01L27/02 , H01L27/04 , H01L19/00