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公开(公告)号：DE1764572A1
公开(公告)日：1971-03-04
申请号：DE1764572
申请日：1968-06-28
Applicant: IBM
Inventor： JOSEPH HERDZIK RICHARD , LEFF JERRY , GEORGE SHEPHEARD ROBERT , PAUL SOPHER RAEMAN , ANTHONY TOTTA PAUL , EDWARD VANDERSEA JOHN
IPC: H01L21/00 , H01L23/485 , H01L
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