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公开(公告)号：DE3688475D1
公开(公告)日：1993-07-01
申请号：DE3688475
申请日：1986-02-21
Applicant: IBM
Inventor： JULIANA ANTHONY , LATTA MILTON RUSSELL , SINCERBOX GLENN TAVERNIA , WILLSON CARLTON GRANT
IPC: H01L21/30 , G01B11/00 , G03F7/207 , G03F9/00 , H01L21/027 , H01L21/67 , H01L21/68 , G03B41/00
