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公开(公告)号：DE3679583D1
公开(公告)日：1991-07-11
申请号：DE3679583
申请日：1986-03-25
Applicant: IBM
Inventor： FREDERICKS EDWARD CARMINE , KELLY KATHLEEN ANN , STANASOLOVICH DAVID
IPC: G03F1/00 , G03F1/08 , G03F7/26 , H01L21/027 , G03F7/075
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