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公开(公告)号：JPH02202980A
公开(公告)日：1990-08-13
申请号：JP29515889
申请日：1989-11-15
Applicant: IBM
Inventor： JIYON JIYOZEFU GURENINGU , KARIN JIIN JIYONSON , UOORUTAA POORU PAUROUSUKII , KENESU JIYOOJI SAKORAFUOSU
IPC: G02F1/1337 , C08J7/12 , C08J7/14 , C09K13/02 , C09K13/04 , G03F7/32 , H01L21/311 , H05K1/03 , H05K3/00 , H05K3/40
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