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公开(公告)号:JPS5487959A
公开(公告)日:1979-07-12
申请号:JP14055778
申请日:1978-11-16
Applicant: IBM
Inventor: KENESU SERITSUGU SATSUCHIYAA , BIKUTAA JIYOSEFU SHIRUBESUTORI
IPC: B21C37/08 , C23C14/16 , F28F13/02 , F28F13/18 , H01L23/427