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公开(公告)号：SG121703A1
公开(公告)日：2006-05-26
申请号：SG200200950
申请日：2002-02-19
Applicant: IBM
Inventor： KIYER SUNDAR , SADANA DEVENDRA K
IPC: H01L21/265 , H01L21/336 , H01L21/74 , H01L21/76 , H01L21/762 , H01L21/8238 , H01L23/52 , H01L27/08 , H01L27/092 , H01L27/12 , H01L29/772 , H01L29/786
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