公开(公告)号：JPH11316265A

公开(公告)日：1999-11-16

申请号：JP3826099

申请日：1999-02-17

Applicant: IBM

Inventor： EVANS RICHARD JAMES ,  KASH JEFFREY ALAN ,  KNEBEL DANIEL RAY ,  NIGH PHILLIP J ,  SANDA PIA NAOKO ,  TSANG JAMES CHEN-HSIANG ,  VALLETT DAVID PAUL

IPC: G01R31/302 ,  G01R31/311

Abstract: PROBLEM TO BE SOLVED: To identify the specific place of a device by selecting and supplying logic input for a circuit that allows a navigating element to be switched, and by fetching the image of light emission being generated according to the result of the switching when processing the logic input. SOLUTION: The logic design concept of a circuit is used, a specific input value for triggering a navigating device or a device near the navigating device is selected, and the specific input value is supplied to a chip for performing logic operation in a circuit device. The devices emit light by switching, and the place and time of each switching operation is stored into the memory of a test device. A designer can estimate a specific device to be switched at a specific point of time in the process of a known input value according to the logic design concept of the circuit. When the circuit completes the processing of the input value, the designer can examine the fetched image of a chip in a specific step during the process where it is judged that the navigating device or the nearby device is switched, thus determining the position of the device.

公开(公告)号：JPH11287848A

公开(公告)日：1999-10-19

申请号：JP3829399

申请日：1999-02-17

Applicant: IBM

Inventor： ANDERSON CARL J ,  HUISMAN LEENDERT MARINUS ,  KNEBEL DANIEL RAY ,  NIGH PHILLIP J ,  SANDA PIA NAOKO

IPC: H01L21/82 ,  G01R31/28 ,  G01R31/30 ,  G01R31/3173 ,  G01R31/319 ,  G01R31/3193

Abstract: PROBLEM TO BE SOLVED: To determine the delay characteristics of a path in an integrated circuit, by inputting a test signal in a signal path of concerning object in a circuit to be tested, and monitoring the position and time of each switching event by each element in the path. SOLUTION: A control system 1 inputs a database 5, operation command from a user interface 6, information of an element to be tested (DUT) 4 and control information to an automatic testing equipment(ATE) 2 and an optical measurement system(OMS) 3 and drives the ATE 2 to test. An OMS 3 monitors the location of discharging photon of each element in the DUT 4 switching in accordance with the input signal together with discharging time, and records the sequence and position of circuit switching function. Then it compares this data with mask shape data concerning the DUT 4 of the database 5 with the control system 1, determines a circuit path containing a switching transistor, aligns and records all switching functions on the chip chronologically to compare, and determines the failure cause of the path.

公开(公告)号：DE69922860D1

公开(公告)日：2005-02-03

申请号：DE69922860

申请日：1999-02-08

Applicant: IBM

Inventor： EVANS RICHARD JAMES ,  KASH JEFFREY ALAN ,  KNEBEL DANIEL RAY ,  NIGH PHILLIP J ,  SANDA PIA NAOKO ,  TSANG JAMES CHEN-HSIANG ,  VALLETT DAVID PAUL

IPC: G01R31/302 ,  G01R31/311 ,  G01R31/27 ,  G01R31/28 ,  G01R31/265 ,  G01R31/26

Abstract: A system and method for determining the location of a particular device on an integrated circuit chip is described. The system and method utilize apparatus for detecting the emission of light during switching events of devices in the circuit during the circuit's processing of an input calculated to actuate the device whose location is desired. Light emissions from the circuit can be temporally and spatially indexed so as to allow deduction, in combination with the a priori knowledge of the logical operation of the circuit, of the location of the desired element. In another embodiment of the invention, a series of images of the circuit can be accumulated, representing the circuit's response to a series of different input signals, each input signal being designed to result in the switching of the desired element. The series of images can be compared to determine the location of the desired element. Also in accordance with the invention, the elements to be located can be either actual functional circuit elements, or fiducials added to the chip for test purposes.

公开(公告)号：DE69922860T2

公开(公告)日：2005-12-15

申请号：DE69922860

申请日：1999-02-08

Applicant: IBM

Inventor： EVANS RICHARD JAMES ,  KASH JEFFREY ALAN ,  KNEBEL DANIEL RAY ,  NIGH PHILLIP J ,  SANDA PIA NAOKO ,  TSANG JAMES CHEN-HSIANG ,  VALLETT DAVID PAUL

IPC: G01R31/302 ,  G01R31/311 ,  G01R31/27 ,  G01R31/28 ,  G01R31/265 ,  G01R31/26

Abstract: A system and method for determining the location of a particular device on an integrated circuit chip is described. The system and method utilize apparatus for detecting the emission of light during switching events of devices in the circuit during the circuit's processing of an input calculated to actuate the device whose location is desired. Light emissions from the circuit can be temporally and spatially indexed so as to allow deduction, in combination with the a priori knowledge of the logical operation of the circuit, of the location of the desired element. In another embodiment of the invention, a series of images of the circuit can be accumulated, representing the circuit's response to a series of different input signals, each input signal being designed to result in the switching of the desired element. The series of images can be compared to determine the location of the desired element. Also in accordance with the invention, the elements to be located can be either actual functional circuit elements, or fiducials added to the chip for test purposes.