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公开(公告)号：JPH09137059A
公开(公告)日：1997-05-27
申请号：JP24298796
申请日：1996-09-13
Applicant: IBM
Inventor： JIEFURII SHII HEDORITSUKU , KONSUTANCHINOSU PAPATOMASU , SUCHIIBUN ERU TEISUDEERU , ARUFURETSUDO BUIIBETSUKU , JIEFURII DEII JIEROOMU , BUOIYA AARU MARUKOBUITSUCHI , TOMASU EICHI RUISU , SUCHIIBUN JIEI FUAANISU
IPC: G03F7/027 , C08L79/00 , G03F7/029 , G03F7/38 , H01L21/027
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