公开(公告)号：DE10125407A1

公开(公告)日：2001-12-20

申请号：DE10125407

申请日：2001-05-25

Applicant: IBM

Inventor： KORHANDARAMAN CHANDRASEKARAN ,  GRELLNER FRANK ,  IYER SUNDAR KUMAR

IPC: H01L21/82 ,  H01L23/525

Abstract: Described herein is a fuse incorporating a covering layer disposed on a conductive layer, which is disposed on a polysilicon layer. The covering layer preferably comprises a relatively inert material, such as a nitride etchant barrier. The covering layer preferably has a region of relatively less-inert filler material. Upon programming of the fuse, the conductive layer, which can be a silicide, preferentially degrades in the region underlying the filler material of the covering layer. This preferential degradation results in a predictable "blowing" of the fuse in the fuse region underlying the filler material. Since the "blow" area is predictable, damage to adjacent structures can be minimized or eliminated.

公开(公告)号：DE10125407B4

公开(公告)日：2006-02-23

申请号：DE10125407

申请日：2001-05-25

Applicant: IBM

Inventor： KORHANDARAMAN CHANDRASEKARAN ,  GRELLNER FRANK ,  IYER SUNDAR KUMAR

IPC: H01L21/82 ,  H01L23/525

Abstract: Described herein is a fuse incorporating a covering layer disposed on a conductive layer, which is disposed on a polysilicon layer. The covering layer preferably comprises a relatively inert material, such as a nitride etchant barrier. The covering layer preferably has a region of relatively less-inert filler material. Upon programming of the fuse, the conductive layer, which can be a silicide, preferentially degrades in the region underlying the filler material of the covering layer. This preferential degradation results in a predictable "blowing" of the fuse in the fuse region underlying the filler material. Since the "blow" area is predictable, damage to adjacent structures can be minimized or eliminated.