公开(公告)号：JP2002057217A

公开(公告)日：2002-02-22

申请号：JP2001160394

申请日：2001-05-29

Applicant: IBM

Inventor： KOTHANDARAMAN CHANDRASEKARAN ,  GRELLNER FRANK ,  IYER SUNDAR KUMAR

IPC: H01L21/82 ,  H01L23/525 ,  H01H85/00

Abstract: PROBLEM TO BE SOLVED: To provide a fuse having a deterioration region which is controlled and can be predicted. SOLUTION: In the fuse incorporating a cover layer arranged on a conductor layer, the conductive layer is arranged on a polysilicon layer. It is desirable that the cover layer include a comparatively inactive material, such as nitride corrosive barrier. The covers layer has a filling material area which is not comparatively inactive. When the fuse is programmed, an area existing below the filing material of the cover layer prudentially deteriorates in the conductive layer which can be silicide. The fuse is fused, which can be predicted, in a fused area, existing below the filling material due to preferential deterioration. Since the 'fused' area can be predicted, damages given to adjacent structure can be suppressed to a minimum or can be laminated.

公开(公告)号：DE10125407A1

公开(公告)日：2001-12-20

申请号：DE10125407

申请日：2001-05-25

Applicant: IBM

Inventor： KORHANDARAMAN CHANDRASEKARAN ,  GRELLNER FRANK ,  IYER SUNDAR KUMAR

IPC: H01L21/82 ,  H01L23/525

Abstract: Described herein is a fuse incorporating a covering layer disposed on a conductive layer, which is disposed on a polysilicon layer. The covering layer preferably comprises a relatively inert material, such as a nitride etchant barrier. The covering layer preferably has a region of relatively less-inert filler material. Upon programming of the fuse, the conductive layer, which can be a silicide, preferentially degrades in the region underlying the filler material of the covering layer. This preferential degradation results in a predictable "blowing" of the fuse in the fuse region underlying the filler material. Since the "blow" area is predictable, damage to adjacent structures can be minimized or eliminated.

公开(公告)号：DE10125407B4

公开(公告)日：2006-02-23

申请号：DE10125407

申请日：2001-05-25

Applicant: IBM

Inventor： KORHANDARAMAN CHANDRASEKARAN ,  GRELLNER FRANK ,  IYER SUNDAR KUMAR

IPC: H01L21/82 ,  H01L23/525

Abstract: Described herein is a fuse incorporating a covering layer disposed on a conductive layer, which is disposed on a polysilicon layer. The covering layer preferably comprises a relatively inert material, such as a nitride etchant barrier. The covering layer preferably has a region of relatively less-inert filler material. Upon programming of the fuse, the conductive layer, which can be a silicide, preferentially degrades in the region underlying the filler material of the covering layer. This preferential degradation results in a predictable "blowing" of the fuse in the fuse region underlying the filler material. Since the "blow" area is predictable, damage to adjacent structures can be minimized or eliminated.