公开(公告)号：JP2002057217A

公开(公告)日：2002-02-22

申请号：JP2001160394

申请日：2001-05-29

Applicant: IBM

Inventor： KOTHANDARAMAN CHANDRASEKARAN ,  GRELLNER FRANK ,  IYER SUNDAR KUMAR

IPC: H01L21/82 ,  H01L23/525 ,  H01H85/00

Abstract: PROBLEM TO BE SOLVED: To provide a fuse having a deterioration region which is controlled and can be predicted. SOLUTION: In the fuse incorporating a cover layer arranged on a conductor layer, the conductive layer is arranged on a polysilicon layer. It is desirable that the cover layer include a comparatively inactive material, such as nitride corrosive barrier. The covers layer has a filling material area which is not comparatively inactive. When the fuse is programmed, an area existing below the filing material of the cover layer prudentially deteriorates in the conductive layer which can be silicide. The fuse is fused, which can be predicted, in a fused area, existing below the filling material due to preferential deterioration. Since the 'fused' area can be predicted, damages given to adjacent structure can be suppressed to a minimum or can be laminated.