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公开(公告)号：IT1149813B
公开(公告)日：1986-12-10
申请号：IT2352880
申请日：1980-07-18
Applicant: IBM
Inventor： ENGLER EDWARD MARTIN , KUPTSIS DEMOSTHENES JOHN , SCHAD GERARD ROBERT , TOMKIEWICZ YAFFA
IPC: G03F7/004 , G03F7/038 , G03F7/039 , H01L
