公开(公告)号：JPH0675378A

公开(公告)日：1994-03-18

申请号：JP15829693

申请日：1993-06-29

Applicant: IBM

Inventor： KURISUTOFUAA JIYON NOOSU ,  ERUUTSUDO HAABAATO MEISHII ,  UEIN MAATEIN MOROO

IPC: C08F8/32 ,  C09B69/10 ,  C09D5/00 ,  C09D133/02 ,  C09D133/26 ,  G02B1/11 ,  G03F7/09 ,  G03F7/11 ,  H01L21/027 ,  H01L21/30 ,  G02B1/10

Abstract: PURPOSE: To obtain an improved material for reflection preventive coating by incorporating an imide reaction product of an amino aromatic chromophore with a polymer containing an anhydride group. CONSTITUTION: This reflection preventive layer forming composition is a coating film forming composition containing the imide reaction product or a N,N-2- substituted amide reaction product of at least one of the amino aromatic chromophore with the polymer containing the anhydride group. Concretely, a novel composition containing the reaction product of the polymer containing the anhydride group with an amine dye strongly absorbing ultraviolet rays in the range of 365nm to 436nm or 193nm to 300nm is provided. By the reaction, at least one of the amino aromatic chromophore is bonded with the polymer. And as the amino aromatic chromophore, any of an aromatic compound having a primary or secondary amino group and high in absorption factor is used and a preferable chromophore is one at least having the absorption factor of 10/μm.