公开(公告)号：JPS6226825A

公开(公告)日：1987-02-04

申请号：JP14040286

申请日：1986-06-18

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  LA VERGNE DEBRA BROUSE ,  TWIEG ROBERT JAMES ,  VOLKSEN WILLI NMN

IPC: B05D5/00 ,  B05D7/26 ,  H01L21/312

公开(公告)号：DE3686103T2

公开(公告)日：1993-03-04

申请号：DE3686103

申请日：1986-05-23

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  LA VERGNE DEBRA BROUSE ,  TWIEG ROBERT JAMES ,  VOLKSEN WILLI NMN

IPC: B05D5/00 ,  B05D7/26 ,  H01L21/312

Abstract: A substrate is planarized by applying a liquid coating to it comprising a polyamide alkyl ester formed from a pyromellitic alkyl diester and a para-linked aromatic diamine dissolved in a solvent containing at least 10% of a co-solvent boiling above 220 DEG C, and curing the coating.

公开(公告)号：DE3686103D1

公开(公告)日：1992-08-27

申请号：DE3686103

申请日：1986-05-23

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  LA VERGNE DEBRA BROUSE ,  TWIEG ROBERT JAMES ,  VOLKSEN WILLI NMN

IPC: B05D5/00 ,  B05D7/26 ,  H01L21/312

Abstract: A substrate is planarized by applying a liquid coating to it comprising a polyamide alkyl ester formed from a pyromellitic alkyl diester and a para-linked aromatic diamine dissolved in a solvent containing at least 10% of a co-solvent boiling above 220 DEG C, and curing the coating.