公开(公告)号：JPS6226825A

公开(公告)日：1987-02-04

申请号：JP14040286

申请日：1986-06-18

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  LA VERGNE DEBRA BROUSE ,  TWIEG ROBERT JAMES ,  VOLKSEN WILLI NMN

IPC: B05D5/00 ,  B05D7/26 ,  H01L21/312

公开(公告)号：DE69324439T2

公开(公告)日：1999-11-25

申请号：DE69324439

申请日：1993-10-29

Applicant: IBM

Inventor： BREYTA GREGORY ,  CLECAK NICHOLAS JEFFRIES ,  HINSBERG III WILLIAM DINAN ,  HOFER DONALD CLIFFORD ,  ITO HIROSHI ,  MACDONALD SCOTT ARTHUR ,  SOORIJAKUMARAN RATMAN

IPC: G03F1/08 ,  G03F7/004 ,  G03F7/039 ,  G03F7/16 ,  G03F7/38 ,  H01L21/027 ,  H01L21/47

Abstract: A lithographic imaging process is provided for use in the manufacture of integrated circuits. A substrate is coated with a polymeric film comprising a vinyl polymer, a photosensitive acid generator, and acid labile groups. It is then heated to typically just above the glass transition temperature of the polymer, but below the cleavage temperature of the acid labile groups. The film is then expose imagewise to radiation to generate free acid, and the film is once more heated, again to typically just above the glass transition temperature of the polymer, but below the cleavage temperature of the acid labile groups. Finally the image is developed. The process provides protection to the photoresist film from airborne chemical contaminants.

公开(公告)号：SG52851A1

公开(公告)日：1998-09-28

申请号：SG1996010825

申请日：1996-10-07

Applicant: IBM

Inventor： BREYTA GREGORY ,  DIPIETRO RICHARD ANTHONY ,  HOFER DONALD CLIFFORD ,  ITO HIROSHI

IPC: G03F7/004 ,  G03F7/039 ,  H01L21/027 ,  H01L21/312

Abstract: A radiation sensitive resist compsn. comprises: (a) bis (lower alkyl phenyl) iodonium camphor sulphonate; and (b) a copolymer comprising hydroxystyrene and (meth)acrylate having an acid-clearable substituent.

公开(公告)号：DE3070348D1

公开(公告)日：1985-04-25

申请号：DE3070348

申请日：1980-12-04

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  KENDRICK RAYMOND DAVID ,  YANNONI COSTANTINO SHELDON

IPC: G01R33/20 ,  G01N24/08 ,  G01R33/46

Abstract: A method and an apparatus for line narrowing in nuclear magnetic resonance (NMR) studies in solids is described. The method employs quasi-continuous amplitude modulation of an rf field (10) wherein the field is eliminated at intervals (18) for short periods of time at or about the time when the amplitude for both the maximum and minimum approach zero, these intervals creating windows where the NMR signal can be observed.

公开(公告)号：DE69004914T2

公开(公告)日：1994-05-19

申请号：DE69004914

申请日：1990-08-30

Applicant: IBM

Inventor： HENDRICK JAMES LUPTON ,  HOFER DONALD CLIFFORD ,  LABADIE JEFFREY WILLIAM ,  SWANSON SALLY ANN ,  VOLKSEN WILLI

IPC: C08G73/06 ,  C08G73/10 ,  H01B3/30

Abstract: Block copolymers of polyimide and poly (phenylquinoxaline) are synthesized. They are useful as packaging materials in the electronics industry.

公开(公告)号：DE3686103D1

公开(公告)日：1992-08-27

申请号：DE3686103

申请日：1986-05-23

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  LA VERGNE DEBRA BROUSE ,  TWIEG ROBERT JAMES ,  VOLKSEN WILLI NMN

IPC: B05D5/00 ,  B05D7/26 ,  H01L21/312

Abstract: A substrate is planarized by applying a liquid coating to it comprising a polyamide alkyl ester formed from a pyromellitic alkyl diester and a para-linked aromatic diamine dissolved in a solvent containing at least 10% of a co-solvent boiling above 220 DEG C, and curing the coating.

公开(公告)号：DE3066410D1

公开(公告)日：1984-03-08

申请号：DE3066410

申请日：1980-09-15

Applicant: IBM

Inventor： AVIRAM ARI ,  HOFER DONALD CLIFFORD ,  KAUFMAN FRANK BENJAMIN ,  KRAMER STEVEN ROBERT ,  HATZAKIS MICHAEL ,  JONES FLETCHER ,  SHAW JANE MARGARET

IPC: G03F7/038 ,  G03C1/72 ,  G03C5/16

公开(公告)号：DE69004914D1

公开(公告)日：1994-01-13

申请号：DE69004914

申请日：1990-08-30

Applicant: IBM

Inventor： HENDRICK JAMES LUPTON ,  HOFER DONALD CLIFFORD ,  LABADIE JEFFREY WILLIAM ,  SWANSON SALLY ANN ,  VOLKSEN WILLI

IPC: C08G73/06 ,  C08G73/10 ,  H01B3/30

Abstract: Block copolymers of polyimide and poly (phenylquinoxaline) are synthesized. They are useful as packaging materials in the electronics industry.

公开(公告)号：DE68906954D1

公开(公告)日：1993-07-15

申请号：DE68906954

申请日：1989-03-15

Applicant: IBM

Inventor： DILLER RICHARD DANIEL ,  ARNOLD ANTHONY FRANCIS ,  CHANG YING YING NMN ,  COTTS PATRICIA METZGER ,  HOFER DONALD CLIFFORD ,  KHOJASTEH MAHMOUD M ,  MACY ELWOOD HERBERT ,  SHAH PRABODH RAMNIKLAL ,  VOLKSEN WILLI NMN

IPC: C09D179/08 ,  B05D5/12 ,  C08G73/10 ,  C08L79/08

公开(公告)号：IT8026720D0

公开(公告)日：1980-12-18

申请号：IT2672080

申请日：1980-12-18

Applicant: IBM

Inventor： YANNONI COSTANTINO SHELDON ,  HOFER DONALD CLIFFORD ,  KENDRICK RAYMOND DAVID

IPC: G01N24/08 ,  G01R33/20 ,  G01R33/46 ,  G01R

Abstract: A method and an apparatus for line narrowing in nuclear magnetic resonance (NMR) studies in solids is described. The method employs quasi-continuous amplitude modulation of an rf field (10) wherein the field is eliminated at intervals (18) for short periods of time at or about the time when the amplitude for both the maximum and minimum approach zero, these intervals creating windows where the NMR signal can be observed.