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公开(公告)号：DE2818525A1
公开(公告)日：1978-11-09
申请号：DE2818525
申请日：1978-04-27
Applicant: IBM
Inventor： JOSHI MADHUKAR LAXMAN , LANDLER PAUL FRANZ-JOSEF , SILVERMAN RONALD
IPC: H01L27/10 , H01L21/306 , H01L21/3205 , H01L21/768 , H01L21/8234 , H01L21/8242 , H01L27/06 , H01L27/108 , H01L29/78 , H01L21/90 , H01L21/72
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