公开(公告)号：DE3272522D1

公开(公告)日：1986-09-18

申请号：DE3272522

申请日：1982-04-15

Applicant: IBM

Inventor： LANGNER GUNTHER OTTO ,  PFEIFFER HANS CHRISTIAN

IPC: H01J31/08 ,  G01R31/02 ,  G01R31/302 ,  G01R31/305 ,  H01J37/28 ,  H01L21/66 ,  H05K3/00 ,  G01R31/28

Abstract: The system tests the continuity of electrical conductors extending through an insulating layer without contact. A flood gun (11) irradiates one side of the body (18) to charge the exposed conductors to a given potential. A steerable electron beam (14) scans the front side to generate secondary electron emission from those conductors, which secondary emission is measured by a detector (24). The secondary emission is enhanced from conductors with conductivity between front side and back side as a result of the surface potential established by the rear flood beam (22). The secondary emission varies depending on the state of continuity in the three-dimensional network of conductors and produces signals at the detector (24) which allow clear discrimination between uninterrupted and interrupted conductors. The system is applicable for unfired ceramics where contact destroys the specimen.