公开(公告)号：DE3379323D1

公开(公告)日：1989-04-13

申请号：DE3379323

申请日：1983-11-03

Applicant: IBM

Inventor： LEWIS ROBERT KENNETH ,  RAY SUDIPTA KUMAR

IPC: H01L21/60 ,  B23K35/38 ,  C23C26/00 ,  H01L21/48 ,  H05K1/03 ,  H05K1/09 ,  H05K3/22 ,  H05K3/24 ,  H05K3/34 ,  B32B15/01

Abstract: The formation of metal oxide contaminants on the surfaces of thin metal films by outdiffusion primarily through the grain boundaries of metal from an underlayer is inhibited by conducting heat cycling of such layered metal structures in an ambient gas mixture composed of inert gas, such as, nitrogen, containing a sufficient amount of active gas, such as hydrogen, carbon monoxide, or the like, at a concentration of up to 5%, preferably 2,5%, substantially to suppress such outdiffusion.