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公开(公告)号：JPH10103914A
公开(公告)日：1998-04-24
申请号：JP24853797
申请日：1997-09-12
Applicant: IBM
Inventor： DORUNDO ALAN D , LISANKE MICHAEL GERARD , LU HUIZONG , MCCORMICK RICHARD J , PENA LANPHUONG THI , SCHNETZER ERIC V , TAHERI ALI REZA
Abstract: PROBLEM TO BE SOLVED: To inspect a large test surface without stopping measurement of individual areas, by detecting the presence of a surface defect and judging and outline of the individual surface defect the position of which is specified. SOLUTION: An upper driving motor 3c turning an upper lead screw 3d is driven in a wide area scan interferometer 2, and a lower driving motor 3e turning a glower lead screw 3f is driven in a narrow area scan interferometer 2a. Each interferometer is moved on a pair of rails 3b in a radial direction to a surface 2b of a disk 2c. The wide area scan interferometer 2 is used to detect a defect of the surface 2b, which forms and interferogram along a linear CCD array. A bright area corresponds to a defect whether or not the defect rises form the surface 2b. When the disk 2c keeps rotating, the narrow area scan interferometer 2a is operated. The wide area scan interferometer 2 completely transverses the surface 2b and stores a position of the detected defect. The narrow area scan interferometer 2a generates an outline of the defect. Alternatively, both interferometers are used simultaneously to drive the narrow area scan interferometer 2a quickly to the position of the detected defect.
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公开(公告)号：JPH10116480A
公开(公告)日：1998-05-06
申请号：JP25541097
申请日：1997-09-19
Applicant: IBM
Inventor： LU HUIZONG , TAHERI ALI REZA
Abstract: PROBLEM TO BE SOLVED: To provide a gliding height tester containing a gliding plate attached so as to rotate around a disk surface and for testing the surface of a spinning magnetic disk. SOLUTION: The gliding height tester contains a magnetic head simulator 2, a disk drive simulator 3 and an interferometer 4. A reflection surface fixed to the gliding plate 5 is image formed by the interferometer device 4 generating a calculation output showing the first angle of the gliding plate. This interferometer device 4 contains a Wollaston prism 34, and this prism is made 90 deg. rotatable for providing an output showing the second angle of the gliding plate perpendicular to the first angle.
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3.发明专利
公开(公告)号：MY115556A
公开(公告)日：2003-07-31
申请号：MYPI9704768
申请日：1997-10-10
Applicant: IBM
Inventor： BARENBOIM MICHAEL , SCHNETZER ERIC V , SEING HONG S , TAHERI ALI REZA , TAM ANDREW CHING , BAUMGART PETER MICHAEL , CHRUSCH PETER P , HARPER BENNY MICHAEL , KARNI BENJAMIN , KERSTENS PIETER J M , LISANKE MICHAEL GERARD , LU HUIZONG , PENA LANPHUONG THI
Abstract: A DISK TEXTURING PROCESS USES A SINGLE PULSED LASER (129) TO TEXTURE DISKS (128, 128b) WITHIN A FIRST GROUP, WHICH ARE CARRIED THROUGH THE TEXTURING PROCESS ON A FIRST SPINDLE ASSEMBLY (128A), AND FROM A SECOND GROUP, WHICH ARE CARRIED THROUGH THE TEXTURING PROCESS ON A SECOND ASSEMBLY (128C). PREFERABLY, DISKS FROM THE FIRST GROUP ARE TEXTURED ALTERNATELY WITH DISKS IN THE SECOND GROUP. A FIRST LEVEL OF LEAST ONE TEXTURING PARAMETER IS STORED FOR USE ONLY AS THE PROCESS IS APPLIED TO DISK FROM THE FIRST GROUP, WHILE A SECOND LEVEL OF THE SAME TEXTURING PARAMETER IS STORED FOR USE ONLY AS THE PROCESS IS APPLIED TO DISKS FROM THE SECOND GROUP. THESE LEVELS MAY BE DERIVED FROM MEASUREMENTS OF TEXTURED SPOTS MADE WITH INTERFEROMETRIC DEVICES (126, 126A) FORMING PORTIONS OF A TEXTURING STATION.
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公开(公告)号：DE69719427T2
公开(公告)日：2003-12-04
申请号：DE69719427
申请日：1997-09-12
Applicant: IBM
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Patent Agency Ranking5.发明专利
公开(公告)号：SG53101A1
公开(公告)日：1998-09-28
申请号：SG1997003715
申请日：1997-10-10
Applicant: IBM
Inventor： BARENBOIM MICHAEL , BAUMGART PETER MICHAEL , CHRUSCH PETER PAUL , HARPER BENNY MICHAEL , KARNI BENJAMIN , KERSTENS PIETER J M , LISANKE MICHAEL GERARD , LU HUIZONG , PENA LANPHUONG THI , SCHNETZER ERIC V , SEING HONG S , TAHERI ALI REZA , TAM ANDREW CHING
Abstract: A disk texturing process uses a single pulsed laser to texture disks within a first group, which are carried through the texturing process on a first spindle assembly, and from a second group, which are carried through the texturing process on a second spindle assembly. Preferably, disks from the first group are textured alternately with disks in the second group. A first level of least one texturing parameter is stored for use only as the process is applied to disks from the first group, while a second level of the same texturing parameter is stored for use only as the process is applied to disks from the second group. These levels may be derived from measurements of textured spots made with interferometric devices forming portions of a texturing station.
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公开(公告)号：DE69722876T2
公开(公告)日：2004-05-13
申请号：DE69722876
申请日：1997-08-28
Applicant: IBM
Inventor： LU HUIZONG , TAHERI ALI REZA
Abstract: An interferometer (10) forms a pair of projected sub-beams by decomposing a single coherent, linearly-polarized beam (14). These sub-beams are focused by an objective lens (52) onto a pair of test spots on a test surface (12). The reflections of these sub-beams are recombined to form an elliptically polarized return beam, which is broken into return sub-beams of opposing polarities in a polarizing beam splitter (64). The intensities of these return sub-beams are used to calculate a difference in height between the two test spots. When these test spots are aligned along a path of relative motion with the test surface, the resulting differences in height are added to form an accumulative profile of the test surface (12).
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公开(公告)号：DE69722876D1
公开(公告)日：2003-07-24
申请号：DE69722876
申请日：1997-08-28
Applicant: IBM
Inventor： LU HUIZONG , TAHERI ALI REZA
Abstract: An interferometer (10) forms a pair of projected sub-beams by decomposing a single coherent, linearly-polarized beam (14). These sub-beams are focused by an objective lens (52) onto a pair of test spots on a test surface (12). The reflections of these sub-beams are recombined to form an elliptically polarized return beam, which is broken into return sub-beams of opposing polarities in a polarizing beam splitter (64). The intensities of these return sub-beams are used to calculate a difference in height between the two test spots. When these test spots are aligned along a path of relative motion with the test surface, the resulting differences in height are added to form an accumulative profile of the test surface (12).
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公开(公告)号：DE69721419D1
公开(公告)日：2003-06-05
申请号：DE69721419
申请日：1997-09-05
Applicant: IBM
Inventor： LU HUIZONG , TAHERI ALI REZA
Abstract: The apparatus includes a polarising beam splitter (24) in which the elliptically polarised return beam is split into a first return sub-beam polarised in a third direction and a second return sub-beam (48), polarised in a fourth direction. perpendicular to the third direction. A first photodetector (66) measures intensity of the first return sub-beam. A second photodetector (68) measures intensity of the second return sub- beam. A portion of the optical device is rotatable about an optical axis extending perpendicular to the reflective surface to measure rotation of the reflective surface in a second direction, perpendicular to the first pivoting direction.
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公开(公告)号：DE69719427D1
公开(公告)日：2003-04-10
申请号：DE69719427
申请日：1997-09-12
Applicant: IBM
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