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Patent Agency Ranking
公开(公告)号：JPH10103914A
公开(公告)日：1998-04-24
申请号：JP24853797
申请日：1997-09-12
Applicant: IBM
Inventor： DORUNDO ALAN D , LISANKE MICHAEL GERARD , LU HUIZONG , MCCORMICK RICHARD J , PENA LANPHUONG THI , SCHNETZER ERIC V , TAHERI ALI REZA
Abstract: PROBLEM TO BE SOLVED: To inspect a large test surface without stopping measurement of individual areas, by detecting the presence of a surface defect and judging and outline of the individual surface defect the position of which is specified. SOLUTION: An upper driving motor 3c turning an upper lead screw 3d is driven in a wide area scan interferometer 2, and a lower driving motor 3e turning a glower lead screw 3f is driven in a narrow area scan interferometer 2a. Each interferometer is moved on a pair of rails 3b in a radial direction to a surface 2b of a disk 2c. The wide area scan interferometer 2 is used to detect a defect of the surface 2b, which forms and interferogram along a linear CCD array. A bright area corresponds to a defect whether or not the defect rises form the surface 2b. When the disk 2c keeps rotating, the narrow area scan interferometer 2a is operated. The wide area scan interferometer 2 completely transverses the surface 2b and stores a position of the detected defect. The narrow area scan interferometer 2a generates an outline of the defect. Alternatively, both interferometers are used simultaneously to drive the narrow area scan interferometer 2a quickly to the position of the detected defect.
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2.发明专利
公开(公告)号：MY115556A
公开(公告)日：2003-07-31
申请号：MYPI9704768
申请日：1997-10-10
Applicant: IBM
Inventor： BARENBOIM MICHAEL , SCHNETZER ERIC V , SEING HONG S , TAHERI ALI REZA , TAM ANDREW CHING , BAUMGART PETER MICHAEL , CHRUSCH PETER P , HARPER BENNY MICHAEL , KARNI BENJAMIN , KERSTENS PIETER J M , LISANKE MICHAEL GERARD , LU HUIZONG , PENA LANPHUONG THI
Abstract: A DISK TEXTURING PROCESS USES A SINGLE PULSED LASER (129) TO TEXTURE DISKS (128, 128b) WITHIN A FIRST GROUP, WHICH ARE CARRIED THROUGH THE TEXTURING PROCESS ON A FIRST SPINDLE ASSEMBLY (128A), AND FROM A SECOND GROUP, WHICH ARE CARRIED THROUGH THE TEXTURING PROCESS ON A SECOND ASSEMBLY (128C). PREFERABLY, DISKS FROM THE FIRST GROUP ARE TEXTURED ALTERNATELY WITH DISKS IN THE SECOND GROUP. A FIRST LEVEL OF LEAST ONE TEXTURING PARAMETER IS STORED FOR USE ONLY AS THE PROCESS IS APPLIED TO DISK FROM THE FIRST GROUP, WHILE A SECOND LEVEL OF THE SAME TEXTURING PARAMETER IS STORED FOR USE ONLY AS THE PROCESS IS APPLIED TO DISKS FROM THE SECOND GROUP. THESE LEVELS MAY BE DERIVED FROM MEASUREMENTS OF TEXTURED SPOTS MADE WITH INTERFEROMETRIC DEVICES (126, 126A) FORMING PORTIONS OF A TEXTURING STATION.
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公开(公告)号：DE69719427T2
公开(公告)日：2003-12-04
申请号：DE69719427
申请日：1997-09-12
Applicant: IBM
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公开(公告)号：DE69719427D1
公开(公告)日：2003-04-10
申请号：DE69719427
申请日：1997-09-12
Applicant: IBM
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5.发明专利
公开(公告)号：SG53101A1
公开(公告)日：1998-09-28
申请号：SG1997003715
申请日：1997-10-10
Applicant: IBM
Inventor： BARENBOIM MICHAEL , BAUMGART PETER MICHAEL , CHRUSCH PETER PAUL , HARPER BENNY MICHAEL , KARNI BENJAMIN , KERSTENS PIETER J M , LISANKE MICHAEL GERARD , LU HUIZONG , PENA LANPHUONG THI , SCHNETZER ERIC V , SEING HONG S , TAHERI ALI REZA , TAM ANDREW CHING
Abstract: A disk texturing process uses a single pulsed laser to texture disks within a first group, which are carried through the texturing process on a first spindle assembly, and from a second group, which are carried through the texturing process on a second spindle assembly. Preferably, disks from the first group are textured alternately with disks in the second group. A first level of least one texturing parameter is stored for use only as the process is applied to disks from the first group, while a second level of the same texturing parameter is stored for use only as the process is applied to disks from the second group. These levels may be derived from measurements of textured spots made with interferometric devices forming portions of a texturing station.
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