公开(公告)号：JP2000152596A

公开(公告)日：2000-05-30

申请号：JP30709599

申请日：1999-10-28

Applicant: IBM

Inventor： HAEBERLE WALTER ,  LUTWYCHE MARK I ,  VETTIGER PETER

IPC: G05D3/00 ,  H02K41/03 ,  H02K41/035 ,  H02N11/00

Abstract: PROBLEM TO BE SOLVED: To provide a magnetic scanning/positioning system which has at least two items of degree of freedom. SOLUTION: A magnetic scanning/positioning system includes a support base 6 to which magnets 7.1 and 7.2 are attached, a movable platform 1 to which at least two electric coils 2 are attached and suspension elements 4 with which the movable platform is elastically connected to the support base. The electric coils 2 are arranged on the movable platform horizontally to provide an essentially flat construction with the movable platform. As the flat construction is combined with the flat support base, a magnetic scanning/positioning system which is characterized in a latently small size, light weight and flat structure, fast response, low power consumption and a relatively large movement range, for instance maximum 10 mm, can be provided. The magnetic scanning/ positioning system with at least two items of degree of freedom can be used in the fields of a scanning probe microscope, data memory and imaging.

公开(公告)号：DE69838327T2

公开(公告)日：2008-05-21

申请号：DE69838327

申请日：1998-10-30

Applicant: IBM

Inventor： HAEBERLE WALTER ,  LUTWYCHE MARK I ,  VETTIGER PETER

IPC: G05D3/00 ,  H02K41/03 ,  H02K41/035 ,  H02N11/00

Abstract: A scanning or positioning system with at least two degrees of freedom is provided comprising a supporting base (6) equipped with magnets (7.1), a movable platform (1) equipped with at least two electrical coils (2) and suspension elements (4) providing an elastic connection between the movable platform and the supporting base. The electrical coils (2) are positioned flat on the movable platform (1), thereby forming an essentially flat arrangement with the movable platform. Combining the flat arrangement with the flat supporting base yields a scanning or positioning system which is potentially compact, lightweight and flat and which features fast response, low power consumption and a relatively large range of motion, e.g. up to 10mm. The scanning or positioning system with at least two degrees of freedom can be used in the field of scanning probe microscopy or in the field of data storage or imaging.

公开(公告)号：DE69838327D1

公开(公告)日：2007-10-11

申请号：DE69838327

申请日：1998-10-30

Applicant: IBM

Inventor： HAEBERLE WALTER ,  LUTWYCHE MARK I ,  VETTIGER PETER

IPC: G05D3/00 ,  H02K41/03 ,  H02K41/035 ,  H02N11/00

Abstract: A scanning or positioning system with at least two degrees of freedom is provided comprising a supporting base (6) equipped with magnets (7.1), a movable platform (1) equipped with at least two electrical coils (2) and suspension elements (4) providing an elastic connection between the movable platform and the supporting base. The electrical coils (2) are positioned flat on the movable platform (1), thereby forming an essentially flat arrangement with the movable platform. Combining the flat arrangement with the flat supporting base yields a scanning or positioning system which is potentially compact, lightweight and flat and which features fast response, low power consumption and a relatively large range of motion, e.g. up to 10mm. The scanning or positioning system with at least two degrees of freedom can be used in the field of scanning probe microscopy or in the field of data storage or imaging.