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公开(公告)号:DE3781086T2
公开(公告)日:1993-03-18
申请号:DE3781086
申请日:1987-10-13
Applicant: IBM
Inventor: CHAN KEVIN KOK , MALUEG VICKI JEAN
IPC: C09J5/00 , B05D7/24 , B32B38/00 , C09J5/02 , C23C24/00 , H05K3/38 , H05K3/44 , H05K3/46 , C23F4/00 , B32B31/12
Abstract: A method for promoting the adhesion of a polymer such as as an epoxy resin to a metal such as copper wherein the metal surface to be adhered is sequentially exposed to a pressurized stream of a slurry containing suspended metal oxide particles followed by treating the metal oxide treated film in a gas plasma containing a fluorohydrocarbon.
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公开(公告)号:DE3781086D1
公开(公告)日:1992-09-17
申请号:DE3781086
申请日:1987-10-13
Applicant: IBM
Inventor: CHAN KEVIN KOK , MALUEG VICKI JEAN
IPC: C09J5/00 , B05D7/24 , B32B38/00 , C09J5/02 , C23C24/00 , H05K3/38 , H05K3/44 , H05K3/46 , C23F4/00 , B32B31/12
Abstract: A method for promoting the adhesion of a polymer such as as an epoxy resin to a metal such as copper wherein the metal surface to be adhered is sequentially exposed to a pressurized stream of a slurry containing suspended metal oxide particles followed by treating the metal oxide treated film in a gas plasma containing a fluorohydrocarbon.
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