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公开(公告)号：JPS62185325A
公开(公告)日：1987-08-13
申请号：JP29264986
申请日：1986-12-10
Applicant: IBM
Inventor： MAAKU SUCHIIBUN CHIEESU , MANI RAMU GIYUPUTA , RANII WAIIRINGU KUONGU , HAABANSU SHIN SACHIDEBU , KURISHIYUNA GANJII SACHIDEBU
IPC: H01L21/302 , G03F7/075 , G03F7/09 , H01L21/027 , H01L21/28 , H01L21/3065 , H01L21/311 , H01L21/312 , H01L21/768
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