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公开(公告)号：DE3169257D1
公开(公告)日：1985-04-18
申请号：DE3169257
申请日：1981-08-28
Applicant: IBM
Inventor： MAUER IV , MICHAIL MICHEL SALIB , WOODARD OLLIE CLIFTON
IPC: H01L21/027 , H01J37/147 , H01J37/317 , H01J37/30
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