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公开(公告)号：DE2457484A1
公开(公告)日：1975-07-10
申请号：DE2457484
申请日：1974-12-05
Applicant: IBM
Inventor： KIRCHNER CHARLES JOHN , MAYER JAMES WALTER , ZIEGLER JAMES FRANCIS
IPC: H01L21/62 , H01L21/00 , H01L23/532 , H01L21/28
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