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公开(公告)号：DE2327351A1
公开(公告)日：1974-01-03
申请号：DE2327351
申请日：1973-05-29
Applicant: IBM
Inventor： GARNACHE RICHARD RAYMOND , GHATALIA ASHWIN KANTILAL , MICHAUD RONALD ADRIAN
IPC: C23F4/00 , B01J15/00 , C23C16/44 , C23C16/54 , C30B25/02 , C30B25/14 , C30B31/10 , C30B31/16 , H01L21/205 , H01L21/22 , H01L21/302 , H01L21/31 , C23C11/00
