公开(公告)号：US3689747A

公开(公告)日：1972-09-05

申请号：US3689747D

申请日：1970-12-09

Applicant: IBM

Inventor： MILIA VINCENT DI ,  HALPERIN ARNOLD ,  KOBLENZ MORRIS A

IPC: C23C14/54 ,  G01B7/06 ,  G05D5/03 ,  G01R23/10 ,  H03D13/00

CPC classification number: G05D5/03 ,  C23C14/546 ,  G01B7/066

Abstract: The thickness and rate of evaporation are determined by digitally monitoring the change in frequency effected by the increasing thickness of deposited evaporation on the monitor crystal of the monitor oscillator in the evaporation stream. A preset digital count is loaded into a counter arrangement and the frequency count on the monitor oscillator, taken over a fixed interval of time, is added to the present count to thereby provide a combined count. The combined count is transferred to a storage register and thereafter successive samples of the frequency count on the monitor oscillator are compared to the combined count in the storage register to provide successive difference counts, indicative of evaporation thickness. An updown counter arrangement is employed to determine evaporation rate by first running up the count on the up-down counter, in response to a sample of the frequency count on the monitor oscillator, taken over a fixed interval of time and then, a fixed time thereafter, running down the count on the up-down counter, in response to a sample of the frequency count of the monitor oscillator, taken over the same fixed interval of time used to run the count up.

Abstract translation: 通过数字监测通过蒸发流中监测振荡器的监测晶体上沉积蒸发厚度的增加而影响的频率变化来确定蒸发的厚度和速率。 将预置的数字计数加载到计数器装置中，并将监视振荡器上的固定时间间隔的频率计数添加到当前计数，从而提供组合计数。 组合的计数被传送到存储寄存器，然后将监视振荡器上的频率计数的连续采样与存储寄存器中的组合计数进行比较，以提供指示蒸发厚度的连续差值计数。 采用升降计数器装置，通过首先在升降计数器上运行计数，以响应于监视振荡器上的频率计数的样本在固定的时间间隔内取出来确定蒸发速率，然后， 之后的固定时间，响应于监视振荡器的频率计数的采样，在用于运行计数的相同的固定时间间隔内，递减计数器上的计数。