公开(公告)号：DE69328328D1

公开(公告)日：2000-05-18

申请号：DE69328328

申请日：1993-07-30

Applicant: IBM

Inventor： DONLAN JR FRASER PATRICK ,  HARE DAVID DWIGHT ,  JONES JEFFREY DONALD ,  MILLER THOMAS LAWRENCE ,  MOORE RONALD JAMES ,  NELSON RICHARD FRANCIS

IPC: B05C5/02 ,  B05D1/36 ,  B08B3/02 ,  C23F1/08 ,  F26B21/00 ,  H01L21/304 ,  H05K3/00 ,  H05K3/06 ,  H05K3/22 ,  H05K3/26

Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.

公开(公告)号：DE69117586D1

公开(公告)日：1996-04-11

申请号：DE69117586

申请日：1991-04-25

Applicant: IBM

Inventor： EMERICK ALAN JAMES ,  MARSH EUGENE LEWIS ,  MILLER THOMAS LAWRENCE ,  ZALESINSKI JERZY MARIA

IPC: H01L21/00 ,  H01L21/48 ,  H01L23/50 ,  H01R43/20 ,  H01R9/09 ,  H05K3/32 ,  H05K13/04

公开(公告)号：DE69328328T2

公开(公告)日：2000-10-19

申请号：DE69328328

申请日：1993-07-30

Applicant: IBM

Inventor： DONLAN JR FRASER PATRICK ,  HARE DAVID DWIGHT ,  JONES JEFFREY DONALD ,  MILLER THOMAS LAWRENCE ,  MOORE RONALD JAMES ,  NELSON RICHARD FRANCIS

IPC: B05C5/02 ,  B05D1/36 ,  B08B3/02 ,  C23F1/08 ,  F26B21/00 ,  H01L21/304 ,  H05K3/00 ,  H05K3/06 ,  H05K3/22 ,  H05K3/26

Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.