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公开(公告)号：DE3265985D1
公开(公告)日：1985-10-10
申请号：DE3265985
申请日：1982-04-27
Applicant: IBM
Inventor： CHANG TAI-HON PHILIP , COANE PHILIP JAMES , HOHN FRITZ-JURGEN , MOLZEN WALTER WILLIAM , ZINGHER ARTHUR RICHARD
IPC: G01R1/06 , G01R1/073 , G01R31/02 , G01R31/26 , G01R31/302 , G01R31/305 , H01B1/24 , H01L21/66 , H05K3/46 , G01R31/28
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