公开(公告)号：US3558899A

公开(公告)日：1971-01-26

申请号：US3558899D

申请日：1968-08-30

Applicant: IBM

Inventor： MORGAN MARK ,  ROTTMANN HANS R

IPC: G06K7/10 ,  G06K9/18 ,  H01L23/544 ,  G01N21/30 ,  G06K7/00 ,  G06M7/00

CPC classification number: G06K7/10871 ,  G06K9/183 ,  H01L23/544 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Coded indicia are placed on the surface of a piece of semiconductor material by etching discrete areas on the material. These indicia represent a numerical code which is physically represented by the etching or nonetching of predetermined ones of said discrete areas. The attenuation or enchancement of radiant flux transmitted or reflected by an etched area differs from that of the radiant flux transmitted or reflected by a nonetched area. Radiant energy is directed onto these indicia, and the transmitted or reflected radiant flux from the areas containing these indicia is measured to determine the change (i.e., attenuation or enhancement) of the radiant flux and to provide a numerical output indication corresponding to the indicia.

公开(公告)号：CA864109A

公开(公告)日：1971-02-16

申请号：CA864109D

Applicant: IBM

Inventor： MORGAN MARK ,  ROTTMANN HANS R

公开(公告)号：DE1943822A1

公开(公告)日：1970-03-05

申请号：DE1943822

申请日：1969-08-28

Applicant: IBM

Inventor： MORGAN MARK ,  RALPH ROTTMAN HANS

IPC: H01L21/66 ,  G06K7/10 ,  G06V30/224 ,  H01L21/02 ,  H01L23/544 ,  G01N21/30

Abstract: 1,262,393. Semi-conductor devices. INTERNATIONAL BUSINESS MACHINES CORP. 22 Aug., 1969 [30 Aug., 1968], No. 41980/69. Heading H1K. [Also in Division G4] Identifying code marks are etched on pieces of semi-conductor material during an early manufacturing stage of a device to be constructed on the material. The code marks may comprise concentric rings which are scanned by a row of photodetectors transverse to the direction of movement of the material, an annular code track which is scanned by a rotating mask and a single detector, or a series of marks having selected spacing to produce different frequency outputs from a detector, the marks being etched in the kerf area between individual wafer areas. In the latter case a clock is gated on by a first detected frequency f3 and each occurrence of a detected code frequency f1 or f2 in coincidence with a clock pulse shifts the corresponding code bit into a shift register. A further frequency f4 at one end of the code indicates the direction of feed and controls the order in which the shift register contents are gated out.

公开(公告)号：CA661275A

公开(公告)日：1963-04-16

申请号：CA661275D

Applicant: IBM

Inventor： MORGAN MARK