公开(公告)号：DE3887891T2

公开(公告)日：1994-08-11

申请号：DE3887891

申请日：1988-11-01

Applicant: IBM

Inventor： FINK HANS-WERNER DR ,  MORIN ROGER DR ,  SCHMID HEINZ ,  STOCKER WERNER

IPC: H01J27/26 ,  G01Q40/02 ,  G01Q70/12 ,  G01Q70/16 ,  G01Q90/00 ,  H01J1/304 ,  H01J37/06 ,  H01J37/073 ,  H01J37/08

Abstract: This source for charged particles comprises a sharply pointed tip (1) and an aperture (2) in a thin sheet of material. If the point of the tip (1) is made sharp enough, i.e., if it ends in a single atom or a trimer of atoms, the electric field existing between the tip (1) and the aperture (2) will cause a stream of electrons to be emitted from the tip (1), pass the aperture (2) and to continue as a beam (4) of free electroms beyond said aperture (2). The sheet (3) carrying the aperture (2) may, for example, be a carbon foil or a metallic foil, including gold. The distance of the tip (1) from the aperture (2) is in the submicron range, and so is the diameter of said aperture (2). The distance is being held essentially constant by means of a feedback loop system. The divergence of the beam (4) is

公开(公告)号：DE3887891D1

公开(公告)日：1994-03-24

申请号：DE3887891

申请日：1988-11-01

Applicant: IBM

Inventor： FINK HANS-WERNER DR ,  MORIN ROGER DR ,  SCHMID HEINZ ,  STOCKER WERNER

IPC: H01J27/26 ,  G01Q40/02 ,  G01Q70/12 ,  G01Q70/16 ,  G01Q90/00 ,  H01J1/304 ,  H01J37/06 ,  H01J37/073 ,  H01J37/08

Abstract: This source for charged particles comprises a sharply pointed tip (1) and an aperture (2) in a thin sheet of material. If the point of the tip (1) is made sharp enough, i.e., if it ends in a single atom or a trimer of atoms, the electric field existing between the tip (1) and the aperture (2) will cause a stream of electrons to be emitted from the tip (1), pass the aperture (2) and to continue as a beam (4) of free electroms beyond said aperture (2). The sheet (3) carrying the aperture (2) may, for example, be a carbon foil or a metallic foil, including gold. The distance of the tip (1) from the aperture (2) is in the submicron range, and so is the diameter of said aperture (2). The distance is being held essentially constant by means of a feedback loop system. The divergence of the beam (4) is