公开(公告)号：DE3887891T2

公开(公告)日：1994-08-11

申请号：DE3887891

申请日：1988-11-01

Applicant: IBM

Inventor： FINK HANS-WERNER DR ,  MORIN ROGER DR ,  SCHMID HEINZ ,  STOCKER WERNER

IPC: H01J27/26 ,  G01Q40/02 ,  G01Q70/12 ,  G01Q70/16 ,  G01Q90/00 ,  H01J1/304 ,  H01J37/06 ,  H01J37/073 ,  H01J37/08

Abstract: This source for charged particles comprises a sharply pointed tip (1) and an aperture (2) in a thin sheet of material. If the point of the tip (1) is made sharp enough, i.e., if it ends in a single atom or a trimer of atoms, the electric field existing between the tip (1) and the aperture (2) will cause a stream of electrons to be emitted from the tip (1), pass the aperture (2) and to continue as a beam (4) of free electroms beyond said aperture (2). The sheet (3) carrying the aperture (2) may, for example, be a carbon foil or a metallic foil, including gold. The distance of the tip (1) from the aperture (2) is in the submicron range, and so is the diameter of said aperture (2). The distance is being held essentially constant by means of a feedback loop system. The divergence of the beam (4) is

公开(公告)号：DE68917310D1

公开(公告)日：1994-09-08

申请号：DE68917310

申请日：1989-12-13

Applicant: IBM

Inventor： FINK HANS-WERNER DR ,  SCHMID HEINZ ,  STOCKER WERNER

IPC: H01J37/073 ,  H01J37/08 ,  H01J37/12

Abstract: The Delta-Phi microlens consists of a first foil (3) of a metal or alloy from the group of transition metals and a second foil (4) of a metal or alloy from the group comprising the elements of IA or IIA groups of the periodic system of elements, the second foil (4) being coated onto one surface of said first foil (3). A hole (2) extends through both foils (3, 4) in precise alignment with the axis (6) of a sharply pointed tip (1) made of conductive material and placed at a distance of the order of 1 mu m from that surface of said first foil (3) opposite said second foil (4). With the first foil (3) connected to ground and a potential on the order of -30 V applied at said tip (1), at ultra-high vacuum conditions, a beam of low-energy electrons will have trajectories (5) deviated towards a focal point (7). With a positive potential of more than 30 V applied to said tip (1), and in a noble gas atmosphere, a beam of ions passing through the microlens of the invention will have trajectories (5) deflected towards said focal point (7).

公开(公告)号：DE3887891D1

公开(公告)日：1994-03-24

申请号：DE3887891

申请日：1988-11-01

Applicant: IBM

Inventor： FINK HANS-WERNER DR ,  MORIN ROGER DR ,  SCHMID HEINZ ,  STOCKER WERNER

IPC: H01J27/26 ,  G01Q40/02 ,  G01Q70/12 ,  G01Q70/16 ,  G01Q90/00 ,  H01J1/304 ,  H01J37/06 ,  H01J37/073 ,  H01J37/08

Abstract: This source for charged particles comprises a sharply pointed tip (1) and an aperture (2) in a thin sheet of material. If the point of the tip (1) is made sharp enough, i.e., if it ends in a single atom or a trimer of atoms, the electric field existing between the tip (1) and the aperture (2) will cause a stream of electrons to be emitted from the tip (1), pass the aperture (2) and to continue as a beam (4) of free electroms beyond said aperture (2). The sheet (3) carrying the aperture (2) may, for example, be a carbon foil or a metallic foil, including gold. The distance of the tip (1) from the aperture (2) is in the submicron range, and so is the diameter of said aperture (2). The distance is being held essentially constant by means of a feedback loop system. The divergence of the beam (4) is

公开(公告)号：BR8903591A

公开(公告)日：1990-03-13

申请号：BR8903591

申请日：1989-07-20

Applicant: IBM

Inventor： FINK HANS-WERNER ,  MORIN ROGER ,  SCHMID HEINZ ,  STOCKER WERNER

IPC: H01J37/141 ,  B23K17/00 ,  H01J9/02 ,  H01J9/14 ,  H01J37/06 ,  H01J37/08 ,  H01J37/12 ,  H01J37/244 ,  H01J37/305 ,  H01J37/31 ,  H01J37/20

Abstract: The method for fabricating exactly aligned apertures for use in electron and ion microscopy involves the placing of a very sharply pointed tip (1) in front of a set of extremely thin metal foils (3, 5) having closely controlled mutual distances in an atmosphere of heavy gas atoms. The application of an elevated voltage at the tip (1) will result in a sputtering operation to commence and erode the metal foils (3, 5) at a location underneath the facing tip (1). The sputtering operation is continued until the first ions are detected to emerge on the far side of the lens structure (2).

公开(公告)号：DE68917310T2

公开(公告)日：1995-03-09

申请号：DE68917310

申请日：1989-12-13

Applicant: IBM

Inventor： FINK HANS-WERNER DR ,  SCHMID HEINZ ,  STOCKER WERNER

IPC: H01J37/073 ,  H01J37/08 ,  H01J37/12

Abstract: The Delta-Phi microlens consists of a first foil (3) of a metal or alloy from the group of transition metals and a second foil (4) of a metal or alloy from the group comprising the elements of IA or IIA groups of the periodic system of elements, the second foil (4) being coated onto one surface of said first foil (3). A hole (2) extends through both foils (3, 4) in precise alignment with the axis (6) of a sharply pointed tip (1) made of conductive material and placed at a distance of the order of 1 mu m from that surface of said first foil (3) opposite said second foil (4). With the first foil (3) connected to ground and a potential on the order of -30 V applied at said tip (1), at ultra-high vacuum conditions, a beam of low-energy electrons will have trajectories (5) deviated towards a focal point (7). With a positive potential of more than 30 V applied to said tip (1), and in a noble gas atmosphere, a beam of ions passing through the microlens of the invention will have trajectories (5) deflected towards said focal point (7).

公开(公告)号：CA1311863C

公开(公告)日：1992-12-22

申请号：CA607014

申请日：1989-07-28

Applicant: IBM

Inventor： FINK HANS-WERNER ,  MORIN ROGER ,  SCHMID HEINZ ,  STOCKER WERNER

IPC: H01J27/26 ,  G01Q40/02 ,  G01Q70/12 ,  G01Q70/16 ,  G01Q90/00 ,  H01J1/304 ,  H01J37/06 ,  H01J37/073 ,  H01J37/08 ,  H01J27/02

Abstract: This source for charged particles, comprises a sharply pointed tip (1) and an aperture (2) in a thin sheet of material. If the point of tip (1) is made sharp enough, i.e., if it ends in a single atom or a triter of atoms, the electric field existing between the tip (1) and the aperture (2) will cause a stream of electrons to be emitted from the tip (1), pass the aperture (2) and to continue as a beam (4) of free electrons beyond said aperture (2). The sheet (3) carrying the aperture (2) may, for example, be a carbon foil or a metallic foil, including gold. The distance of the tip (1) from the aperture (2) is in the submicron range, and so is the diameter of said aperture (2). The distance is being held essentially constant by means of a feedback loop system. The divergence of the beam (4) is