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公开(公告)号：DE3368771D1
公开(公告)日：1987-02-05
申请号：DE3368771
申请日：1983-08-31
Applicant: IBM
Inventor： DAVIS JAMES WILLIAM , LEININGER JOEL CALVIN , MUNOZ-BUSTAMANTE CARLOS , ROBBINS GORDON JAY
IPC: G01R31/28 , G01R31/3185 , H01L21/822 , H01L27/04 , H03K3/286 , H03K3/2885 , H03K3/288
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