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公开(公告)号:FR2313777A1
公开(公告)日:1976-12-31
申请号:FR7605141
申请日:1976-02-17
Applicant: IBM
Inventor: HEUBER KLAUS , NAJMAN KNUT , REMSHARDT ROLF DR , TERTEL KLAUS
IPC: H01L21/822 , H01L21/761 , H01L27/02 , H01L27/04 , H01L27/06
公开(公告)号:FR2313777A1
公开(公告)日:1976-12-31
申请号:FR7605141
申请日:1976-02-17
Applicant: IBM
Inventor: HEUBER KLAUS , NAJMAN KNUT , REMSHARDT ROLF DR , TERTEL KLAUS
IPC: H01L21/822 , H01L21/761 , H01L27/02 , H01L27/04 , H01L27/06