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公开(公告)号：JPS6045065A
公开(公告)日：1985-03-11
申请号：JP6130384
申请日：1984-03-30
Applicant: IBM
Inventor： NARASHIBAA KANDATSUPA ANANSA , YAKOBU RAIZUMAN , POORU JIYAMIN TSUANGU
IPC: H01L21/331 , H01L21/74 , H01L21/8222 , H01L21/8224 , H01L27/082 , H01L29/73 , H01L29/732 , H01L29/735
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