公开(公告)号：DE3671482D1

公开(公告)日：1990-06-28

申请号：DE3671482

申请日：1986-01-07

Applicant: IBM

Inventor： BABU SURYADEVARA VIJAYAKUMAR ,  LU NENG-HSING ,  NILSEN CARL-OTTO

IPC: H01L21/302 ,  C23C14/56 ,  C23C16/54 ,  C23F4/00 ,  H01L21/3065 ,  H05K3/00 ,  H01J37/32 ,  H05H1/46

公开(公告)号：DE3668821D1

公开(公告)日：1990-03-15

申请号：DE3668821

申请日：1986-11-11

Applicant: IBM

Inventor： GRUZMAN BORIS ,  NILSEN CARL-OTTO

IPC: B23K26/00 ,  B23K26/08 ,  B23K26/12 ,  B23K26/14 ,  B23K26/38 ,  B23K26/40 ,  H05K3/00

Abstract: Method and apparatus for laser cutting sheet material (56) and especially for laser cutting composite sheet material. An inert gas shield (60, 88), preferably of nitrogen, is provided at the cutting zone to minimize charred edges of the cut material and resulting in an extremely accurate and uniform cut line. The gas shield (60, 88) can also be used to accurately position the sheet material (56) so as to lie at the focal point of the laser beam (80). Alternatively, a vacuum (68, 70) can draw the sheet material against a supporting surface (58), for positioning the sheet material (56). In a continuous process, one or more stationary lasers (72) operating on an advancing web (141) of the sheet material (56) are positioned to cut in the longitudinal direction and a movable laser is positioned to cut in the transverse direction. Mechanical expedients enable the movable laser to make a cut perpendicular to the cut made by each stationary laser (72) without interrupting the movement of the sheet material (56).