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公开(公告)号：DE59307710D1
公开(公告)日：1998-01-02
申请号：DE59307710
申请日：1993-02-15
Applicant: IBM
Inventor： BAYER THOMAS , GRESCHNER JOHANN DR DIPL PHYS , NONNENMACHER MARTIN DR DIPL PH
IPC: G01B21/30 , G01B7/34 , G01N37/00 , G01Q60/38 , H01J37/28
