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公开(公告)号：DE3277890D1
公开(公告)日：1988-02-04
申请号：DE3277890
申请日：1982-07-16
Applicant: IBM
Inventor： DOUGHERTY WILLIAM EDWIN , GREER STUART EUGENE , NESTORK WILLIAM JOHN , NORRIS WILLIAM TILDEN
IPC: H01L23/52 , H01L23/538
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